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SPIE Proceedings [SPIE Sixth International Conference on Thin Film Physics and Applications - Shanghai, China (Tuesday 25 September 2007)] Sixth International Conference on Thin Film Physics and Applications - New approach to formation of nanopore on SOI: SiC/Si heteroepitaxial growth by supersonic jet CVD

✍ Scribed by Ikoma, Yoshifumi; Ono, Kenta; Uenuma, Mutsunori; Ogata, Tomohiko; Motooka, Teruaki; Shen, Wenzhong; Chu, Junhao

Book ID: 121454191
Publisher: SPIE
Year: 2008
Weight: 579 KB
Volume: 6984
Category: Article
DOI: 10.1117/12.792771

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