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SPIE Proceedings [SPIE Seventh International Conference on Thin Film Physics and Applications - Shanghai, China (Friday 24 September 2010)] Seventh International Conference on Thin Film Physics and Applications - Mg/B4C EUV multilayer by introducing Co as barrier layer

✍ Scribed by Li, Haochuan; Zhou, Sika; Huang, Qiushi; Tan, Moyan; Jiang, Li; Zhu, Jingtao; Wang, Xiaoqiang; Wang, Fengli; Zhang, Zhong; Wang, Zhanshan; Chen, Lingyan; Chu, Junhao; Wang, Zhanshan

Book ID: 121189017
Publisher: SPIE
Year: 2010
Weight: 397 KB
Volume: 7995
Category: Article
DOI: 10.1117/12.888272

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