✦ LIBER ✦

SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Calibration of compact OPC models using SEM contours

✍ Scribed by Granik, Yuri; Weed, J. Tracy; Martin, Patrick M.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE Photomask Technol

✍ Smith, Mark D.; Graves, Trey; Byers, Jeffrey D.; Mack, Chris A.; Weed, J. Tracy; 📂 Article 📅 2005 🏛 SPIE ⚖ 138 KB

SPIE Proceedings [SPIE Photomask Technol

✍ Abdo, Amr; Fathy, Rami; Madkour, Kareem; Oberschmidt, James; Fischer, Daniel; Ta 📂 Article 📅 2005 🏛 SPIE ⚖ 286 KB

SPIE Proceedings [SPIE Photomask Technol

✍ Cobb, Nicolas B.; Granik, Yuri; Grenon, Brian J.; Kimmel, Kurt R. 📂 Article 📅 2002 🏛 SPIE ⚖ 377 KB

SPIE Proceedings [SPIE 27th Annual BACUS

✍ Shang, Shumay; Granik, Yuri; Niehoff, Martin; Naber, Robert J.; Kawahira, Hiroic 📂 Article 📅 2007 🏛 SPIE ⚖ 560 KB