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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Cost-effective masks for deep x-ray lithography

✍ Scribed by Scheunemann, Heinz-Ulrich; Loechel, Bernd; Jian, Linke; Schondelmaier, Daniel; Desta, Yohannes M.; Goettert, Jost; Chiao, Jung-Chih; Varadan, Vijay K.; Can, Carles

Book ID: 121405464
Publisher: SPIE
Year: 2003
Weight: 758 KB
Volume: 5116
Category: Article
DOI: 10.1117/12.498986

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