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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Laser annealing for high-Q MEMS resonators

✍ Scribed by Aubin, Keith L.; Zalalutdinov, Maxim; Reichenbach, Robert B.; Houston, Brian H.; Zehnder, Alan T.; Parpia, Jeevak M.; Craighead, Harold G.; Chiao, Jung-Chih; Varadan, Vijay K.; Can, Carles

Book ID: 115476242
Publisher: SPIE
Year: 2003
Weight: 944 KB
Volume: 5116
Category: Article
DOI: 10.1117/12.499109

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