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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Characterization of SU-8 as a photoresist for electron-beam lithography

✍ Scribed by Nallani, Arun K.; Park, Sang Won; Lee, Jeong Bong; Chiao, Jung-Chih; Varadan, Vijay K.; Can, Carles

Book ID: 121476929
Publisher: SPIE
Year: 2003
Weight: 957 KB
Volume: 5116
Category: Article
DOI: 10.1117/12.499112

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