SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Rapid prototyping and structure generation using three-dimensional nanolithography with electron-beam-induced chemical reactions

✍ Scribed by Koops, Hans W.; Chiao, Jung-Chih; Varadan, Vijay K.; Can‰, Carles

• Book ID: 120556454
• Publisher: SPIE
• Year: 2003
• Weight: 350 KB
• Volume: 5116
• Category: Article
• DOI: 10.1117/12.500603