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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Nanotechnology - MOS-based nanocapacitor using C-AFM

✍ Scribed by Hill, Daniel; Sadewasser, Sascha; Aymerich, Xavier; Vajtai, Robert; Aymerich, Xavier; Kish, Laszlo B.; Rubio, Angel

Book ID: 120471192
Publisher: SPIE
Year: 2003
Weight: 484 KB
Volume: 5118
Category: Article
DOI: 10.1117/12.498556

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