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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - New process to fabricate DXRL x-ray mask by direct pattern writing

✍ Scribed by Ling, Zhong G.; Lian, Kun; Wen, Shirong; Yasaitis, John A.; Perez-Maher, Mary Ann; Karam, Jean Michel

No coin nor oath required. For personal study only.

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