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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Thick SU-8 photolithography for BioMEMS

✍ Scribed by Rabarot, Marc; Bablet, Jacqueline; Ruty, Marine; Kipp, Matthieu; Chartier, Isabelle; Dubarry, Christophe; Yasaitis, John A.; Perez-Maher, Mary Ann; Karam, Jean Michel

Book ID: 121497542
Publisher: SPIE
Year: 2003
Weight: 955 KB
Volume: 4979
Category: Article
DOI: 10.1117/12.478244

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