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SPIE Proceedings [SPIE International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Kiev, Ukraine (Thursday 11 May 1995)] International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Raman studies of silicon layers formed by cluster beam deposition

✍ Scribed by Ehbrecht, M.; Holz, L.; Huisken, Friedrich; Polivanov, Yu. N.; Smirnov, V. V.; Stelmakh, O. M.; Svechnikov, Sergey V.; Valakh, Mikhail Y.

Book ID: 120492425
Publisher: SPIE
Year: 1995
Weight: 182 KB
Volume: 2648
Category: Article
DOI: 10.1117/12.226210

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