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SPIE Proceedings [SPIE 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Dalian, China (Monday 26 April 2010)] 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment - Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models

✍ Scribed by Gao, Weidong; Zhang, Yinhua; Liu, Hongxiang; Zhang, Yudong; Sasián, José; Xiang, Libin; To, Sandy

Book ID
120256097
Publisher
SPIE
Year
2010
Weight
405 KB
Volume
7656
Category
Article

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