Spectroscopic ellipsometry study of thin NiO films grown on Si (100) by atomic layer deposition

✍ Scribed by Lu, H. L.; Scarel, G.; Alia, M.; Fanciulli, M.; Ding, Shi-Jin; Zhang, David Wei

• Book ID: 120185668
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 652 KB
• Volume: 92
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2938697