✦ LIBER ✦

Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching

✍ Scribed by Mendoza-Galván, Arturo ;Järrendahl, Kenneth ;Arwin, Hans ;Huang, Yi-Fan ;Chen, Li-Chyong ;Chen, Kuei-Hsien

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

In situ spectroscopic ellipsometry studi

✍ N.J. Ianno; S. Nafis; Paul G. Snyder; Blaine Johs; John A. Woollam 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 244 KB

Electron cyclotron resonance etching of

✍ Suraiya Nafis; Natale J. Ianno; Paul G. Snyder; William A. McGahan; Blaine Johs; 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 238 KB

Ex situ variable angle spectroscopic ell

✍ Glennis J. Orloff; John A. Woollam; Ping He; William A. McGahan; J.R. McNeil; R. 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 470 KB

Kinetic and electrical characterization

✍ M. J. Herna´ndez; M. Cervera; J. Garrido; J. Marti´nez; J. Piqueras 📂 Article 📅 1999 🏛 Springer US 🌐 English ⚖ 177 KB

Electron cyclotron resonance plasma depo

✍ R. Bonnot; A. Gouskov; G. Bougnot 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 968 KB

Langmuir probe analysis of distributed e

✍ Delmotte, F.; Hugon, M. C.; Agius, B.; Pointu, A. M.; Teodoru, S. 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 306 KB