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Kinetic and electrical characterization of thin silicon oxide films obtained by electron cyclotron resonance plasma

✍ Scribed by M. J. Herna´ndez; M. Cervera; J. Garrido; J. Marti´nez; J. Piqueras

Book ID
110271692
Publisher
Springer US
Year
1999
Tongue
English
Weight
177 KB
Volume
10
Category
Article
ISSN
0957-4522

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