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Electron cyclotron resonance etching of semiconductor structures studied by in-situ spectroscopic ellipsometry

✍ Scribed by Suraiya Nafis; Natale J. Ianno; Paul G. Snyder; William A. McGahan; Blaine Johs; John A. Woollam

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 238 KB
Volume: 233
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90101-t

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