In-situ dual-wavelength and ex-situ spectroscopic ellipsometry studies of strained SiGe epitaxial layers and multi-quantum well structures

✍ Scribed by C. Pickering; R.T. Carline; D.J. Robbins; W.Y. Leong; D.E. Gray; R. Greef

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 383 KB
• Volume: 233
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(93)90073-x