✦ LIBER ✦
Electron cyclotron resonance plasma deposition and etching of silicon nitride on GaSb for optoelectronic applications
✍ Scribed by R. Bonnot; A. Gouskov; G. Bougnot
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 968 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0921-5107
No coin nor oath required. For personal study only.