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Sorption of Acetone and Phenol on Natural Film Coatings of Electrodes of a Bulk Acoustic Wave Piezoelectric Resonator

✍ Scribed by T. A. Kuchmenko; Zh. Yu. Kochetova; Ya. I. Korenman

Book ID: 110314074
Publisher: SP MAIK Nauka/Interperiodica
Year: 2001
Tongue: English
Weight: 41 KB
Volume: 56
Category: Article
ISSN: 1061-9348
DOI: 10.1023/a:1012536220416

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## Abstract On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from exp