Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator

✍ Scribed by Xiaotun Qiu; Rui Tang; Jie Zhu; Jonathon Oiler; Cunjiang Yu; Ziyu Wang; Hongyu Yu

• Book ID: 108265300
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 309 KB
• Volume: 147
• Category: Article
• ISSN: 0925-4005
• DOI: 10.1016/j.snb.2010.04.012