Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate
✍ Scribed by Humberto Campanella; Pascal Nouet; Arantxa Uranga; Pedro de Paco; Nuria Barniol; Jaume Esteve
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 180 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
Abstract
On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model‐based de‐embedding of the FBAR parameters. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 4–7, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22986