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Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator

✍ Scribed by Naik, R.S.; Lutsky, J.J.; Reif, R.; Sodini, C.G.

Book ID: 120073997
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 857 KB
Volume: 45
Category: Article
ISSN: 0885-3010
DOI: 10.1109/58.646930

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