Numerical modeling of thin-film bulk acoustic wave resonators using a Crank-Nicolson finite-difference time-domain method
✍ Scribed by Dagang Wu; Ji Chen; Ce Liu; Frank Bi
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 284 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
Abstract
In this study, an unconditionally stable finite‐difference time‐domain (FDTD) method implemented with Crank‐Nicolson scheme is presented for the analysis of thin‐film bulk acoustic wave resonators (TFBARs).The proposed approach is unconditionally stable and therefore, the algorithm can significantly reduce the computer processing unit (CPU) time compared to that of the conventional FDTD algorithm. The accuracy and efficiency of the proposed method for calculating resonator frequencies of TFBARs are verified by simulation results. © 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett, 2011; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26135