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[IEEE 2013 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) - Changsha, China (2013.10.25-2013.10.27)] 2013 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications - Preparation of the Bragg reflectors of tuneable thin film bulk acoustic wave resonators by RF sputtering

โœ Scribed by Luo, Wei; Wu, Li-Jia; Fu, Qiu-yun; Chen, Xiang-yu; Zhou, Dong-xiang


Book ID
125493990
Publisher
IEEE
Year
2013
Weight
504 KB
Category
Article
ISBN
1479932892

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