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Some examples of depth resolution in SIMS analysis

โœ Scribed by G. Prudon


Book ID
103616448
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
497 KB
Volume
63
Category
Article
ISSN
0169-4332

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๐Ÿ“œ SIMILAR VOLUMES


High Depth Resolution SIMS Analysis with
โœ Jiang, Zhi-Xiong; Alkemade, Paul F. A.; Algra, Eelke; Radelaar, S. ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 334 KB

By the use of a deceleration electrode in the primary beam line of a magnetic sector SIMS instrument, an O 2 primary beam of variable energy and angle has been produced. The SIMS measurements of ultrathin Ge and B layers in Si were performed with low-energy (0.7-2 keV) and grazingly incident (50-75ร„