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Depth-profile analysis of nanostructures by SIMS: Depth resolution function

✍ Scribed by Yu. Kudriavtsev; S. Gallardo; A. Villegas; G. Ramirez; R. Asomoza


Book ID
111500992
Publisher
Allerton Press Inc
Year
2008
Tongue
English
Weight
152 KB
Volume
72
Category
Article
ISSN
1062-8738

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## Abstract Depth profiling of aluminium metallization in microelectronics devices by Auger or SIMS analysis is impeded by the severe sputter‐induced roughening which causes a serious loss in depth resolution. This paper discusses strategies to avoid this deteriorating effect: optimization of the b