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Some effects of boron doping in a-SiC:H films prepared by the ECR-CVD method

โœ Scribed by S.F. Yoon; R. Ji; J. Ahn

Book ID
117148120
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
471 KB
Volume
211
Category
Article
ISSN
0022-3093

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