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Solid phase epitaxy of amorphous Ge films deposited by PECVD

✍ Scribed by Quan-Bao Ma; Ruben Lieten; Maarten Leys; Stefan Degroote; Marianne Germain; Gustaaf Borghs


Book ID
116629966
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
835 KB
Volume
331
Category
Article
ISSN
0022-0248

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