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Solid phase epitaxial regrowth of buried amorphous silicon layers obtained by ion irradiation

✍ Scribed by A.V. Buravlyov; L.Y. Krasnobaev; A.A. Malinin; V.V. Kireiko; V.V. Starkov; A.F. Vyatkin

Book ID: 113285388
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 570 KB
Volume: 88
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)95321-x

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