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A study of the solid phase epitaxial regrowth of amorphous silicon utilizing differential reflectometry

✍ Scribed by D.R. Hagmann; W. Xi; R.E. Hummel

Book ID: 113281510
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 453 KB
Volume: 59-60
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)95187-i

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