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Continuum simulation of solid phase epitaxial regrowth of amorphized silicon including most advanced physical interactions

✍ Scribed by Delalleau, Julien ;Pakfar, Ardechir ;Bazizi, El-Medhi ;Simola, Roberto ;Tavernier, Clement


Book ID
105365977
Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
277 KB
Volume
208
Category
Article
ISSN
0031-8965

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