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Soft X-ray photoelectron microscopy used for the characterization of diamond, a-C and CNx, thin films

✍ Scribed by Ziethen, Ch.; Wegelin, F.; Schönhense, G.; Ohr, R.; Neuhäuser, M.; Hilgers, H.

Book ID: 122784364
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 886 KB
Volume: 11
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(01)00597-0

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