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SiO2 film thickness metrology by x-ray photoelectron spectroscopy

✍ Scribed by Lu, Z. H.; McCaffrey, J. P.; Brar, B.; Wilk, G. D.; Wallace, R. M.; Feldman, L. C.; Tay, S. P.


Book ID
118152097
Publisher
American Institute of Physics
Year
1997
Tongue
English
Weight
519 KB
Volume
71
Category
Article
ISSN
0003-6951

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