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Thickness determination of molecularly thin lubricant films by angle-dependent X-ray photoelectron spectroscopy

✍ Scribed by Chongjun Pang; Mingwu Bai

Book ID
108060107
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
219 KB
Volume
253
Category
Article
ISSN
0169-4332

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## Silicon with thermally-grown oxide overlayers m the thickness range IS-89 A IS studied by angulardcpendent XPS. Electron attenuation lengths at 1382 eV are found to be 37 +-4 A in SiOz and 27 +-6 A in Si. Single-crystal effects and thin-layer anomalies are also discussed.