Measurements of X-ray fluorescence spectra versus grazing incident angles provide information on elemental composition as well as density and thickness of near surface layers. Calculations of fluorescence intensities are presented, which are used for the evaluation of data obtained by total reflecti
Single particle transfer for quantitative analysis with total-reflection X-ray fluorescence spectrometry
β Scribed by Fumitaka Esaka; Konomi T. Esaka; Masaaki Magara; Satoshi Sakurai; Shigekazu Usuda; Kazuo Watanabe
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 174 KB
- Volume
- 251
- Category
- Article
- ISSN
- 0168-583X
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
This paper reviews and discusses the error factors in quantitative total reflection x-ray fluorescence analysis, primarily with regard to the surface contamination of silicon wafers. The error factors were classified into three origins: instrumental, sample and data processing. The instrumental erro
Various x-ray optical conΓΌgurations combining focusing and monochromatizing mirrors for application in total reΓ½ection x-ray Γ½uorescence (TXRF) spectrometry were numerically modelled for the case of extended x-ray sources. The inΓ½uence of the system parameters, such as mirror shape, the extension of