## X-ray photoelectron spectra of two Ta-Ti bilayers on a Si wafer are measured using a soft x-ray synchrotron radiation beamline at the Photon Factory. The grazing incident x-rays are used to excite photoelectrons. The photoelectron intensity dependence is measured as the change in the glancing an
Optimization of curved x-ray multilayer mirrors for total reflection x-ray fluorescence spectrometry
✍ Scribed by Krassimir Stoev; Joachim Knoth; Heinrich Schwenke
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 408 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0049-8246
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✦ Synopsis
Various x-ray optical conügurations combining focusing and monochromatizing mirrors for application in total reýection x-ray ýuorescence (TXRF) spectrometry were numerically modelled for the case of extended x-ray sources. The inýuence of the system parameters, such as mirror shape, the extension of the source, the angular divergence and the nature of the multilayer (uniform or graded ML), on the detection limits (DL) of TXRF were studied for two excitation energies of practical interest : 9.67 keV (W Lb) and 17.48 keV (Mo Ka). No signiücant dependence of the DL on the mirror shape was observed. For smaller anode sizes the use of curved x-ray mirrors leads to a more signiücant improvement in the DL compared with a ýat mirror. The use of graded ML mirrors does not bring signiücant advantages to TXRF because of the very short section of the ML used and the corresponding very low gradient in the d-spacing over this section. A combination of focusing x-ray mirrors with ýat ML monochromators is of advantage only for anode-sample distances longer than 20 cm. Optimum DLs can be achieved with a circular Pt mirror and a ýat double ML for 9.67 keV and a circular ML mirror for 17.48 keV.
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