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Simulation of ion beam induced crystallization and amorphization in (0 0 1) silicon

✍ Scribed by K. Gärtner; B. Weber

Book ID: 114164738
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 153 KB
Volume: 180
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)00428-1

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