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Simulation and fabrication of attenuated phase-shifting masks: CrF_x

✍ Scribed by Kim, Eunah ;Hong, Seungbum ;Kim, Kyong-Sub ;Jiang, Zhong-Tao ;Kim, Dae Weon ;Lim, Sungchul ;Woo, Sang-Gyun ;Koh, Young-Bum ;No, Kwangsoo

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