Optical properties of thin/thick film stacks: Application to attenuated phase-shifting masks and photoresist characterization

✍ Scribed by P. Schiavone; G. Granet

• Book ID: 114155754
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 259 KB
• Volume: 41-42
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(98)00028-8