✦ LIBER ✦
Optical simulation, optimized design and fabrication of (ZrO2)x–(Al2O3)1−x composite films with thin inserted TiO2 layers for ArF-line high transmission attenuated phase shift mask blank applications
✍ Scribed by Fu-Der Lai
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 641 KB
- Volume
- 252
- Category
- Article
- ISSN
- 0169-4332
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