✦ LIBER ✦

Attenuated phase-shifting masks of chromium aluminum oxide

✍ Scribed by Kim, Eunah ;Hong, Seungbum ;Lim, Sungchul ;Kim, Yong-Beom ;Woo, Sang-Gyun ;Kim, Dae-Weon ;No, Kwangsoo

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Simulation and fabrication of attenuated

✍ Kim, Eunah ;Hong, Seungbum ;Kim, Kyong-Sub ;Jiang, Zhong-Tao ;Kim, Dae Weon ;Lim 📂 Article 📅 1997 🏛 The Optical Society 🌐 English ⚖ 384 KB

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Lithographic evaluation of a DUV carbon

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✍ P. Schiavone; G. Granet 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 259 KB

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