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TiNx as a new embedded material for attenuated phase shift mask

✍ Scribed by Wen-an Loong; Tzu-ching Chen; Jin-chi Tseng

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 730 KB
Volume: 30
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00217-0

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