Placement of scattering bars in binary and attenuated phase shift mask for damascene trench patterning

✍ Scribed by Sohan Singh Mehta; Navab Singh; Moitreyee Mukherjee-Roy; Rakesh Kumar

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 581 KB
• Volume: 35
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/j.mejo.2003.10.008