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SIMS analysis of HfSiO(N) thin films

✍ Scribed by Shiro Miwa; Susumu Kusanagi; Hajime Kobayashi

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 366 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.02.093

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