Comparative SIMS and SNMS analyses of amorphous semiconductor thin films

✍ Scribed by H. Gnaser; W. Bock; H. Oechsner; T.K. Bhattacharayya

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 371 KB
• Volume: 70-71
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90395-r