✦ LIBER ✦

Silicon X-ray masks: Pattern placement and overlay accuracy

✍ Scribed by H. Betz; H.-L. Huber; S. Pongratz; W. Rohrmoser; W. Windbracke; U. Mescheder

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

State of the art of pattern placement ac

✍ S. Pongratz; U. Mescheder; Ch. Ehrlich; H.-L. Huber; K. Kohlmann; W. Windbracke 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 573 KB

Pattern placement metrology on x-ray mas

✍ S.C. Nash; C. Bläsing-Bangert; K.-D. Röth 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 241 KB

Basic study of optical pattern placement

✍ T. Sugihara; T. Arakawa; K. Okada; K. Kodama; H. Izawa 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 307 KB

Pulse plating of quarter micron gold pat

✍ B. Löchel; A. Macioßek; J. Trube; H.-L. Huber 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 369 KB

X-ray lithography using silicon nitride

✍ Detlef Ewald 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 399 KB

Thickness inhomogeneity during silicon X

✍ B. Löchel; A. Macioβek; M. König; H.-L. Huber 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 327 KB