✦ LIBER ✦
Thickness inhomogeneity during silicon X-ray mask membrane fabrication: Generation and prevention
✍ Scribed by B. Löchel; A. Macioβek; M. König; H.-L. Huber
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 327 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
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