✦ LIBER ✦
Pulse plating of quarter micron gold patterns on silicon X-ray masks
✍ Scribed by B. Löchel; A. Macioßek; J. Trube; H.-L. Huber
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 369 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0167-9317
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