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Silicon-to-silicon direct bonding method

✍ Scribed by Shimbo, M.; Furukawa, K.; Fukuda, K.; Tanzawa, K.

Book ID: 120416836
Publisher: American Institute of Physics
Year: 1986
Tongue: English
Weight: 500 KB
Volume: 60
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.337750

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