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Direct silicon-silicon bonding by electromagnetic induction heating

✍ Scribed by Thompson, K.; Gianchandani, Y.B.; Booske, J.; Cooper, R.F.

Book ID: 118254705
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 289 KB
Volume: 11
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2002.800929

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